JPH01173650U - - Google Patents
Info
- Publication number
- JPH01173650U JPH01173650U JP7027288U JP7027288U JPH01173650U JP H01173650 U JPH01173650 U JP H01173650U JP 7027288 U JP7027288 U JP 7027288U JP 7027288 U JP7027288 U JP 7027288U JP H01173650 U JPH01173650 U JP H01173650U
- Authority
- JP
- Japan
- Prior art keywords
- center
- movable substrate
- electrode
- substrate
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000013013 elastic material Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7027288U JPH01173650U (en]) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7027288U JPH01173650U (en]) | 1988-05-30 | 1988-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173650U true JPH01173650U (en]) | 1989-12-08 |
Family
ID=31295525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7027288U Pending JPH01173650U (en]) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173650U (en]) |
-
1988
- 1988-05-30 JP JP7027288U patent/JPH01173650U/ja active Pending